En la actualidad, la llegada de la tercera generación de semiconductores representada por SiC y GaN ha impulsado el desarrollo de módulos de potencia hacia la miniaturización, alto voltaje, alta corriente y alta densidad de potencia, que generarán mayor calor durante el uso, lo que plantea Requisitos estrictos para el paquete de disipación de calor del dispositivo. En la nueva generación de módulos de alta potencia, el sustrato cerámico desempeña principalmente el papel de soporte de chip, aislamiento eléctrico y canal de conductividad térmica, y la cerámica de nitruro de silicio se ha convertido en un material de sustrato de disipación de calor con un gran potencial de aplicación en virtud de sus ventajas de alta temperatura. Conductividad y altas propiedades mecánicas.
Cómo obtener un sustrato de nitruro de silicio de alto rendimiento con propiedades mecánicas y conductividad térmica es una de las cuestiones que más preocupan a la industria actual. Debido al bajo coeficiente de difusión de los átomos de Si y N en el sustrato cerámico de nitruro de silicio, la transformación de fase, el desarrollo de grano y la densificación deben lograrse mediante sinterización en fase líquida. Por lo tanto, es una forma eficaz de mejorar las propiedades mecánicas y térmicas de las cerámicas de nitruro de silicio ajustar la fase líquida y la micromorfología en el proceso de sinterización con aditivos de sinterización adecuados.
Tipos de ayudas para la sinterización sin óxido
Fluoruro
En la solución de silicato, los átomos de flúor pueden destruir la estructura de la red de silicato y hacer que se descomponga, lo que reducirá la temperatura y la viscosidad de la formación de la fase líquida y promoverá la densificación de la sinterización. Por ejemplo, el uso de MgF2 en lugar de MgO como agente de sinterización puede formar una fase líquida a una temperatura más baja, acelerar la densificación de las cerámicas y aumentar el tamaño del grano con el aumento de la adición de MgF2, lo que puede mejorar eficazmente la conductividad térmica de Cerámicas de nitruro de silicio. Además, existen LiF, fluoruro de tierras raras, fluoruro binario, etc.
La curva de temperatura de desplazamiento de las cerámicas de Si3N4 se preparó utilizando MgF2 y MgO como aditivos de sinterización.
Los aditivos de sinterización de fluoruro evitan la introducción de átomos de oxígeno adicionales en el sistema, reducen la actividad del SiO2 en la fase líquida y dificultan la formación de oxígeno reticular durante el proceso de precipitación por disolución. Al mismo tiempo, la energía atómica del flúor reduce la viscosidad de la fase líquida, ayuda a formar la fase líquida a baja temperatura, promueve el desarrollo de granos de β-Si3N4 de gran tamaño y las cerámicas de nitruro de silicio preparadas tienen un bajo nivel de oxígeno en la red y un bajo nivel de oxígeno. contenido de fase intercristalina de conductividad térmica y alta conductividad térmica de la cerámica. Sin embargo, la volatilización excesiva de SiF4 aumentará la porosidad de la cerámica y reducirá las propiedades mecánicas y la conductividad térmica, por lo que es necesario controlar la cantidad adecuada de adición.
Nitruros y compuestos que contienen nitrógeno
Metal nitride has good compatibility with silicon nitride ceramics, and is often used as a sintering assistant to prepare silicon nitride ceramic materials, which can enhance the thermal conductivity of silicon nitride ceramics and strengthen its mechanical properties. MgSiN2, as a potential high thermal conductivity ceramic, has attracted much attention as a sintering aid for silicon nitride ceramics in recent years. At high temperature, SiO2 on the surface of MgSiN2 and Si3N4 powder will form Mg-Si-O-N liquid phase and promote densification. In addition, a portion of Si and N atoms are separated out in the form of Si3N4 to optimize grain boundaries. In recent years, by using MgSiN2 instead of MgO, researchers have prepared silicon nitride ceramics with high thermal conductivity and excellent mechanical properties at lower sintering temperature and shorter holding time. Li Jiangtao's team from the Technical Institute of Physics and Chemistry of the Chinese Academy of Sciences prepared MgSiN2 in batches through self-propagating sintering, laying a material foundation for the large-scale application of MgSiN2. It is expected to be used as an efficient sintering aid for silicon nitride ceramics with high thermal conductivity.
The silicon nitride ceramics with low lattice oxygen content and high thermal conductivity were prepared by using MgSiN2 as sintering assistant
In addition, some researchers used solid phase reaction to synthesize a new non-oxide sintering agent Y2Si4N6C to replace Y2O3 as a sintering agent, which not only has low lattice oxygen content, but also weakened the scattering of phonons by intergranular phase and grain boundary film, which can greatly improve the thermal conductivity of silicon nitride ceramic substrate. However, the preparation process of Y2Si4N6C is complex, and it cannot be synthesized in large quantities for the time being, which limits its application.
Borides
The densified Si3N4 ceramics with LaB6 as the sintering agent do not introduce additional oxygen into the system, and can remove lattice oxygen through the dissolution precipitation process, improve the thermal conductivity of β-Si3N4 grains, and at the same time, the content of low thermal conductivity intercrystalline phases is less, the grain size is larger, and the phonon scattering between grains is weakened. This is because during the sintering process, B atoms enter the glass network, and the formed [BO3]- structural unit will replace the [SiO4]- structural unit in the original network, destroying the integrity of the glass network, reducing the liquid phase viscosity, and thus promoting low temperature sintering.
Silicides
It has been found that iron silicide (FeSix) has a certain regulatory effect on the phase transition and grain growth of silicon nitride ceramics. For example, FeSi2 can generate β-Si3N4 phase before the α-Si3N4 phase transition, providing nucleation and growth points for the later α-Si3N4 phase transition. It is helpful to regulate the phase transition and grain growth process in the sintering of silicon nitride ceramics. ZrSi2 can react with SiO2 on the surface of silicon nitride powder to produce ZrO2 and β-Si3N4 crystal seeds. In situ ZrO2 and MgO assistant form a low temperature eutectic liquid phase, which promotes ceramic densification and β-Si3N4 grain development through dissolution precipitation mechanism. Due to the consumption of SiO2 by ZrSi2, the oxygen content in the liquid phase is reduced, thereby impeding the generation of lattice oxygen dynamically and reducing lattice defects. In addition, Zr elements in the sintered body are precipitated in the form of ZrN (or ZrO2) phase, and there is no obvious amorphous grain boundary film between Si3N4 grains, which reduces the scattering of phonons at the grain boundaries. Thanks to the above three factors, the thermal conductivity of Si3N4 has been greatly improved. However, the difficulty of both thermal conductivity and mechanical properties limits the application of ZrSi2 as a sintering aid for high-conductivity silicon nitride ceramics.
Schematic diagram of densification mechanism of silicon nitride ceramics containing ZrSi2-MgO additive
Hydrides and Metal Particles
Metal hydride is a commonly used oxygen consumption agent in powder metallurgy industry, which is decomposed into metal elements and H2 at high temperatures, H2 can remove the oxide layer on the surface of metal particles, and the highly active metal elements generated by decomposition play the role of absorbing impurity oxygen in the metal matrix, which can effectively improve the performance of metal products. Rare earth hydrides such as YH2 can reduce the activity of SiO2 in the liquid phase and facilitate the removal of lattice oxygen during dissolution precipitation. In addition, the "nitrogen-rich" liquid phase formed by the addition of YH2 is also conducive to the nucleation and development of β-Si3N4, and the grain size is significantly larger than that of Y2O3 additive system. However, excessive hydride makes the liquid viscosity too high, inhibits the densification process, and the fully developed β-Si3N4 grains cross to form a porous skeleton, which can not prepare high density silicon nitride ceramics. Therefore, it is still necessary to determine the optimal amount of rare earth hydride according to the oxygen content of α-Si3N4 raw material powder.
Ternary Layered Compound
The fracture toughness can be improved by introducing layered compounds into silicon nitride ceramic matrix through crack deflection, bridge and other mechanisms. In recent years, researchers have investigated the effect of layered compounds on the thermal conductivity of silicon nitride ceramics, and found that layered compounds can effectively improve the mechanical thermal properties of ceramics. YB2C2 can react with SiO2 on the surface of silicon nitride powder to reduce the liquid phase oxygen content and promote densification. The remaining YB2C2 layer improves the bending strength and fracture toughness of the ceramics through crack deflection mechanism.
Carbon, Silicon Sintering Additives
Carbon is widely used to remove oxygen impurities from ores because of its strong reducibility. In the study of silicon nitride, a small amount of carbon can promote α→β phase transition in silicon nitride sintering. Carbon thermal reduction deoxygenation can adjust the composition and properties of the liquid phase, and then regulate the relative rate of phase transition and densification, so that the silicon nitride ceramics with good morphology can be obtained without adding β-Si3N4 seed.
(a, c) Sample microstructure after nitriding without addition and (b, d) sample microstructure
after nitriding with buried powder containing C (a, b) and microstructure of silicon nitride after air
It is worth noting that the introduction of C needs to be controlled precisely in the sintering system of silicon nitride ceramics, the addition amount is too small, and the control effect of liquid phase is not good. Excessive addition will lead to residual SiC in the sample, which will adversely affect the density and electrical properties of silicon nitride ceramics. The results show that Si can also remove the surface oxide layer by silicothermal reduction reaction with SiO2. Unlike toner, which requires precise control of the amount of addition, excess Si is nitrided to Si3N4 in a nitrogen atmosphere, without the formation of harmful by-products.
The research of optimizing raw material powder of silicon nitride by carbothermal reduction and silicothermal reduction, and improving the performance of silicon nitride ceramics by means of liquid phase regulation provides a solution for the preparation of high thermal conductivity silicon nitride ceramics by using low-cost silicon nitride powders with high oxygen content.
Dado que los polvos de nitruro de silicio con bajo contenido de oxígeno en la red aún no han logrado un gran avance, existe una forma económica y eficaz de mejorar la conductividad térmica de las cerámicas de nitruro de silicio mediante el uso de no óxidos en lugar de los correspondientes aditivos de sinterización de óxidos y ajustando el líquido. composición de fases. Con la optimización continua del polvo de materia prima de nitruro de silicio, el desarrollo continuo de nuevos aditivos de sinterización multifuncionales y la mejora continua de los procesos de moldeo y sinterización, la producción a gran escala de sustratos de Si3N4 de alta resistencia y alta temperatura se ha convertido en un realidad, que desempeñará un fuerte apoyo para el desarrollo de dispositivos semiconductores de potencia.
